NuPure Corporation

Optics™ OA
Room Temperature Purifier for Optics Purge Gases

	FEATURES
	Removal of impurities to < 0.5 ppb¹ No heaters or power required Room-temperature operation 316L SS (<10 Ra EP) vessel Factory regenerable for up 10 year life Field regenerable for up to 10 year life Improved process equipment perfomance Optional built-in 0.003 µm filter (PF type) High Flow - up to 2500 slpm Lowest cost (initial and operating)
APPLICATIONS	NuPure's Optics™ OA Gas Purifier is designed to purify CDA, Inerts (e.g. Nitrogen or Helium), O₂, and O₂/Inert gas mixtures. It reduces hydrocarbons and other gaseous impurities commonly found in N₂ and CDA to PPT levels using room temperature operation. The Optics™ OA is ideally suited to purifying gases for lens purging. The NuPure® Optics™ OA contains a new proprietary combination of non-reactive inorganic absorber media containing no hydrocarbons or sulfur compounds. Because the Optics™ OA does not react with oxygen, complicated temperature sensing equipment is not required, and because no heat is generated during our purification process, the Optics™ OA purifier can be located at the point-of-use with no effect on temperature sensitive processes. The NuPure Optics™ OA gas purifiers come in standard size ranges from 0 to 2500 slpm. The use of optional factory-installed inlet isolation valve is recommended for elimination of possible operator error during installation.
Photolithography Lens Purging Removal of hydrocarbons Removal of sulfur compounds Manufacturing of flat panel displays Metrology

IMPURITIES REMOVED¹

Version	SO₂/SO_x	H₂S	Toluene	CO/CO₂	NH₃	H₂O	NMHCs	Particles
PF or XL	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb
								0.003 µm or 1 µm

1 - Removes: acid gases, alcohols, amines, ammonia, CO/CO₂, hydrocarbons, H₂O, H₂S, NO_x, SO₂, SO_x, siloxanes and toluene

Dimensional and Performance Specifications

Purifier Model	A in (mm)	B in (mm)	C in (mm)	Particle Filtration Level	Max Flow @90 psig	Part Number
Mini OA	3.3 (84)	1.5 (38)	1.0 (25)	0.003 µm* or 1 µm	4 slpm	00040-OA-VR4-PF¹ or XL
100 OA	3.3 (84)	1.5 (38)	1.5 (38)	0.003 µm* or 1 µm	12 slpm	00100-OA-VR4-PF¹ or XL
200 OA	4.8 (122)	3.0 (76)	1.5 (38)	0.003 µm* or 1 µm	25 slpm	00200-OA-VR4-PF¹ or XL
600 OA	6.3 (160)	4.5 (114)	2.0 (51)	0.003 µm* or 1 µm	75 slpm	00600-OA-VR4-PF¹ or XL
1000 OA	8.8 (224)	7.0 (178)	2.0 (51)	0.003 µm* or 1 µm	125 slpm	01000-OA-VR4-PF¹or XL
1200 OA	7.9 (202)	6.1 (156)	2.5 (63)	0.003 µm* or 1 µm	350 slpm	01200-OA-VR4-PF¹or XL
2000 OA	12.5 (317)	10.7 (272)	2.5 (63)	0.003 µm* or 1 µm	250 slpm	02000-OA-VR4-PF¹ or XL
3000 OA	17.3 (439)	15.5 (394)	3.0 (76)	0.003 µm* or 1 µm	375 slpm	03000-OA-VR4-PF¹ or XL
3000 OA	17.7 (449)	15.6 (396)	3.0 (76)	0.003 µm* or 1 µm	500 slpm	03000-OA-VR2-PF¹ or XL
10000 OA²	24.9 (632)	22.8 (579)	4.0 (101)	0.003 µm* or 1 µm	1200 slpm	10000-OA-VR2-PF¹ or XL
15000 OA²	24.9 (632))	22..8 (579)	5.0 (127)	0.003 µm* or 1 µm	1800 slpm	15000-OA-VR2-PF¹ or XL
25000 OA²	24.9 (632)	22.8 (570)	6.0 (152)	0.003 µm* or 1 µm	2500 slpm	25000-OA-VR2-PF¹ or XL

Maximum Pressure	250 psig (USA) / 9.9 kg/cm²G (Japan)	Materials	316L SS (< 10Ra EP)
Operating Temperature	Room Temperature	Fittings	1/4" MVCR³ available on sizes Mini-3000
Leak Rate	< 2 x 10^-9atm cc/sec He		1/2" MVCR³ available on sizes 3000-25000

1 - Sub-micron filtration only with PF version.

2 - For models 10000 and larger - the printed dimensions are subject to future change. Please check with factory prior ordering.

3 - VCR-compatible fittings standard. VCR is Registered Trademark of Cajon Corp. Special fittings on request.

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