Nupure CorporationNupure Corporation
OMNI Point-of-Use Gas Purifier Systems

OMNI Point-of-Use Gas Purifier Systems
FEATURES

 

  • Integral purifier, heater, insulation and electronics assembly

  • Compact Design

  • Easy-to-use

  • Sub ppb removal of impurities from Inert Gases, Hydrogen, Acid Gases and Oxygen.

  • Certified temperature comtrol unit and electronics designed for simple operation, reliability and safety

  • Continual heated operation or room temperature operation with convenient in-situ regeneration
APPLICATIONS
   
  • Analyzers (Zero/Calibration Gases)
  • Analytical Carts
  • Process Tools
  • Research and Development
  • Semiconductor Industry
The NuPure Omni series of Point-of-Use purifier systems incorporate the UltraPure PF series purifier filter or UltraPre XL series purifier, reducing gaseous impurities, (see chart below) to sub-ppb levels from Inert Gases, Hydrogen and Hydrides, Acid Gases and Oxygen. The PF series includes particle filtration to 0.003rm. The NuPure Purifier Systems are available in a standard range of 0 - 100 slpm.

The NuPure Omni Series is available in a wall mounted configuration offering a low cost fully integrated system including manual inlet, outlet and bypass valves, and optional gas particle filter. 

 
LISTING OF GASES PURIFIED / FILTERED

Inert Gases

Hydrogen & Hydrides

Acid Gases

Oxygen

Impurities Removed

H2O, O2, CO, CO2, H21 (N2, CH4)2

Impurities Removed

H2O, O2, CO2, CO (N2) 3

Impurities Removed

H2O

Impurities Removed

H2O, CO2
He
Ar/CH4
Ne
CH4
Ar
CF4
Kr
CCL4
Xe
SF6
N2
Freons
H2
As/H3
Ar/H2
PH3
N2/H2
NH3
SiH4
B2H6
Si2H6
H2Se
D.C.S.
GeH4
HBr
HCl
HF
BCl3
BF3
Cl2
O2
Air
N20
 
 
 
1 - Only with purchase of - H model.
2 - Additional Impurities removed from He, Ne, Ar, Kr, Xe, & N2 only, using heated getter.
3 - Additional Impurities removed from Hydrogen only, using heated getter.
diagram
Omni Series Purifier Module
Omni Series Purifier System
Model
Average Flow (slpm)1
for 1 year lifetime (removal of impurities per chart page 1)
Max Flow (slpm)
@ 150 psig (Heated)
Omni 40
0.3
1.5
Omni 100
1
5
Omni 200
2
10
Omni 600
6
30
Omni 1000
10
50
Omni 2000
20
100
Voltage 115/240 V AC
Housing Extruded Aluminum 6063
Maximum Pressure 250 psig / 9.9 kg/cm2G (Japan)
Operating Temperature 375oC-450oC
Leak Rate < 2x10-10 atm cc/sec He
Materials (Purifier) 316L S.S.(< 10Ra)
Fittings 1/4" VCR2 Compression
Gas Inlet VLSI grade (99.9995% nominal)1
1- Lifetime is inversely proportional to the total inlet level and to the average flow. Lifetime for H20/02 removal only using getter purifiers is approx. 4 years at the stated flows/inlet gas.
2- VCR compatible fitting standard. VCR is a registered trademark of Cajon Corporation.

Nupure Corporation
 106B Schneider Road, Ottawa ON  K2K 1Y2 Canada
Tel 1-613-836-0336 Fax 1-613-836-0297
E-mail: sales@nupure.com
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Nupure® and Eliminator® are registered trademarks of Nupure Corporation