UltraPure™ High Flow Purifier Vessels and Component Sets

	FEATURES
	Cost-effective alternative to a turnkey system Easy-to-assemble  Sub-ppb removal of impurities from Inert Gases, Hydrogen, Acid Gases, and Oxygen Factory tested temperature control unit (TCU) assembly, designed for simple operation and reliability 316L stainless steel electropolished wetted surface finish (optional < 15Ra) In-Situ regeneration and bakeable to 450o C

APPLICATIONS   SemiConductor Industry     High Purity Welding     Fab Construction/Purge Gases     Bottle Filling (HP Version)     Industrial/Metal Processing

UltraPure™ High Flow Purifier Vessels and Component Sets allow for the simple fabrication of Gas Purifier Systems for flows ranging from 30 - 4000 slpm, for most Bulk Gases including Argon, Helium, Nitrogen, Hydrogen and Oxygen. The UltraPure™ High Flow Purifier vessels will reduce gaseous impurities (as listed below), to sub-ppb levels. High Flow Gas Purifiers are available in the UltraPure™ XL series for the Electronics Industry (< 1 ppb outlet) and an industrial version (< 10 ppb outlet) High pressure purifiers (max 3000 psig) available upon request, ideal for gas bottle filling plants and other similar high pressure applications.

LISTING OF GASES PURIFIED / FILTERED
Impurities Removed H2O,O2,CO,CO2,H21(N2,CH4)2	Impurities Removed H2O,O2,CO2,CO(N2)3	Impurities Removed H2O	Impurities Removed H2O,CO2(H2CO,CH4)4
Argon Helium Nitrogen	Hydrogen Argon/Hyrdogen Nitrogen/Hydrogen Ammonia Silane	Hydrogen Chloride	Oyxgen Air Nitrous Oxide

1 -	Only with purchase of - H model.
2 -	Additional impurities removed from Ar, He & N2 only, using heated getter.
3 -	Nitrogen and Methane removed from Hydrogen, Argon/Hydrogen and Nitrogen/Hydrogen, using heated getter.
4 -	Only with purchase of optional heated catalyst

Product Specifications

 

Model 3,500 - 10,000 Model 20,000 - 50,000

Model	A inches	B inches	C inches	Fittings inches	Average Flows (slpm)1 1 year lifetime (removal of impurities per chart page 1)	Max Flow (slpm) @ 150 psig Heated	Max Flow (slpm) @ 150 psig Room Temp
3500	13.5"	11.0"	3.5"	1/2	30	160	280
5000	32.4"	30.4"	3.0"	1/2	45	225	395
10,000	47.0"	45.0"	4.0"	1/2	90	450	790
20,000	63.0"	66.0"	5.0"	1/2	180	900	1,575
30,000	63.0"	66.0"	6.0"	1/2	270	1,350	2,365
50,000	63.0"	66.0"	7.5"	3/4	450	2,250	4,000

Maximum Pressure 250 psig (USA)/9.9 kg/cm2G (Japan) Materials 316L S.S. (< 15 Ra Max) Operating Temperature Room Temperature or 375 - 450oC Fittings MVCR Leak Rate < 2 x 10-10 atm cc/sec He Gas Inlet VLSI grade (99.9995% nominal)1

1 - Lifetime is inversely proportional to the total inlet impurity level and to the average flow. Lifetime for H2O/O2 removal only using getter purifiers is approx. 4 years at the stated flows / inlet gas. Room temperature getter purifiers require periodic regeneration to achieve this total lifetime.

Optional Accessories

UHP High Flow Gas Valves 0.003 µm Ceramic or Metal Particle Filter Pressure Transducer with digital display High Pressure Vessels (ASME Code) Heat Exchanger	External Band Heater (See note below) Thermal Insulation Blanket High Flow Mass Flow Meters TCU Electronics Assembly APIMS testing for all impurities
Note: For regeneration and for applications requiring removal of all impurities, an external band heater and TCU electronics assembly is required.   Request for Quotation    Homepage    UltraPure™ Division    Download

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