• Outlet purity guarantee to < 0.5 ppb¹
• No heaters or power required
• Room-temperature operation
• 316L SS (<10 Ra EP) vessel life-no need for H₂ in regenaration gas
• Field regenerable for up to 10 year life - 
• Improved process equipment perfomance
• Optional built-in 0.003 µm filter (PF-Series)
• High Flow - up to 300 slpm
• Low cost (initial and operating)

 

• APIMS  Zero and Calibration
• Semiconductor Industry
• Semiconductor Process Equipment
• Gas Cylinder Cabinets
• Gas Analyzer Carts
• Analytical Industry

 

The NuPure®  Eliminator® CAG uses a new, patented  Catalyst/Absorber/Getter (CAG) purifier technology, which represents a major improvement over all other inert gas chemistries. This results in the best outlet purity guarantees of < 0.5 ppb¹ per impurity². The CAG purifiers achieve this outstanding perfomance at room temperature. They are ideally suited to purifying inert gases from liquid sources. 

The NuPure®  Eliminator® CAG gas purifiers come in standard size ranges from 0 to 300 slpm, with the XL version especially suitable for high flow applications. The use of factory-installed inlet isolation valve is recommended for ease of installation and elimination of possible operator error. 

With the purchase of the newly-introduced Field Regeneration Kit, the purifier's operating cost can be reduced to almost zero. Field regeneration is particularly simple and convenient because the CAG can be regenerated without need for hydrogen!. 

IMPURITIES REMOVED

Gas	Model	H2O	O2	CO2	CO	H2	NMHC	CH4	Particles2
N2	XL or PF	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	<1 pcf down to 0.01 µm
Noble	XL or PF	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	< 0.5 ppb	<1 pcf down to 0.01 µm