Nupure Corporation

THE ELIMINATOR® CAG
Room Temperature Purifier for Inert Gases and Hydrogen

 

 
FEATURES
Model 600 CAG
  • Outlet purity guarantee to < 0.5 ppb1
  • No heaters or power required
  • Room-temperature operation
  • 316L SS (<10 Ra EP) vessel life-no need for H2 in regenaration gas
  • Field regenerable for up to 10 year life - 
  • Improved process equipment perfomance
  • Optional built-in 0.003 µm filter (PF-Series)
  • High Flow - up to 300 slpm
  • Low cost (initial and operating)
   
APPLICATIONS
 

         

        • APIMS  Zero and Calibration
        • Semiconductor Industry
        • Semiconductor Process Equipment
        • Gas Cylinder Cabinets
        • Gas Analyzer Carts
        • Analytical Industry

         

The NuPure®  Eliminator® CAG uses a new, patented  Catalyst/Absorber/Getter (CAG) purifier technology, which represents a major improvement over all other inert gas chemistries. This results in the best outlet purity guarantees of < 0.5 ppb1 per impurity2. The CAG purifiers achieve this outstanding perfomance at room temperature. They are ideally suited to purifying inert gases from liquid sources. 

The NuPure®  Eliminator® CAG gas purifiers come in standard size ranges from 0 to 300 slpm, with the XL version especially suitable for high flow applications. The use of factory-installed inlet isolation valve is recommended for ease of installation and elimination of possible operator error. 

With the purchase of the newly-introduced Field Regeneration Kit, the purifier's operating cost can be reduced to almost zero. Field regeneration is particularly simple and convenient because the CAG can be regenerated without need for hydrogen!

 

 

 

 

IMPURITIES REMOVED

Gas

Model

H2O

O2

CO2

CO

H2

NMHC

CH4

Particles2

N2  

XL or PF

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

<1 pcf down to 0.01 µm
Noble

XL or PF

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

<1 pcf down to 0.01 µm

1-
Based on a VLSI Grade Liquid Gas source. Nitrogen Not Removed. Removal of all impurities can be accomplished using heated getter purifiers.  
  See brochures for the NuPure® PF Series® and Omni™ Series Gas Purifiers.    
2-
Particle removal is guaranteed with PF version only. 
     

diagram

 

Model

A
in  (mm)
B
in  (mm)
C
in  (mm)

Average Flow @ 1 yr regeneration

Max Flow1 @130 psig

E 40 CAG

5.7   (145)

1.0   (25)

 8.5   (216)

0.3 slpm

3 slpm 

E 100 CAG

5.7   (145)

1.5   (38)

8.5   (216)

0.8 slpm

8 slpm 

E 200 CAG

10   (254)

1.5   (38)

12.8   (325)

2 slpm

20 slpm 

E 600 CAG

14.6   (371)

2.0   (51)

17.4   (442)

6 slpm

60 slpm 

E 1000 CAG

22.1   (561)

2.0   (51)

24.9   (632)

10 slpm

100 slpm 

E 2000 CAG

33.1   (866)

2.5   (64)

35.9   (937)

20 slpm

200 slpm 

Maximum Pressure  250 psig (USA) / 9.9 kg/cm2G (Japan) Materials  316L SS (< 10Ra EP) finish
Operating Temperature  Room Temperature Fittings  1/4" VCR2
Leak Rate < 2 x 10-9 atm cc/sec He Gas Inlet VLSI grade (99.9995% minimum)

1-
Operation at high flow may result in a high pressure drop. Contact factory for technical assistance.
2-
VCR compatible fitting standard. VCR® is a registered trademark of Cajon Corporation

 

NuPure® THE ELIMINATOR® Nitrogen Purifier 
Model 200 CAG @5 slpm, 130 psig
Outlet Purity data as measured by APIMS*
Outlet Purity Data

 

 

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106B Schneider Road, Ottawa ON  K2K 1Y2 Canada
Tel 1- 613-836-0336 Fax 1- 613-836-0297
E-mail:
sales@nupure.com

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